陶凯,丁海,张佳艺,等.基于不同衬底材料的TiO2/Cu/Ag/TiO2多层复合透明导电薄膜的制备与性能研究[J].精密成形工程,2025,17(3):188-197.
TAO Kai,DING Hai,ZHANG Jiayi,et al.Preparation and Properties of TiO2/Cu/Ag/TiO2 Multilayer Transparent Conductive Film on Different Substrate Materials[J].Journal of Netshape Forming Engineering,2025,17(3):188-197. |
| 基于不同衬底材料的TiO2/Cu/Ag/TiO2多层复合透明导电薄膜的制备与性能研究 |
| Preparation and Properties of TiO2/Cu/Ag/TiO2 Multilayer Transparent Conductive Film on Different Substrate Materials |
| 投稿时间：2024-10-11 |
| DOI：10.3969/j.issn.1674-6457.2025.03.021 |
| 中文关键词: 透明导电薄膜 多层结构 磁控溅射 介质层 种子层 |
| 英文关键词: transparent conductive film multilayer structure magnetron sputtering dielectric layer seed layer |
| 基金项目:河南省科技攻关项目(232102231016，242102311241);河南工学院博士科研基金(KQ1851) |
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| 中文摘要: |
| 目的 在不同衬底材料上磁控溅射沉积TiO2/Cu/Ag/TiO2多层复合透明导电薄膜并分析其微观结构和光电性能，以探讨衬底材料对复合薄膜性能的影响规律。方法 选用纯度≥99.99%的TiO2、Cu和Ag靶材，采用射频和直流溅射电源，在钙钠玻璃和柔性PET衬底上分别逐层溅射沉积不同结构参数的TiO2/Cu/Ag/TiO2复合薄膜。利用扫描电子显微镜、原子力显微镜、紫外-可见分光光度计和四探针测试仪等对薄膜的微观形貌、物相、透光性和导电性进行检测。结果 在玻璃衬底上逐层沉积已优化结构的复合薄膜，得到界面组织均匀、透光性和导电性优异的样品，可见光波段的平均透射率Tave(400-800)为91.73%，表面电阻Rs为5.52 Ω/□，品质因子ϕTC(400-800)达76.47×10−3 Ω−1。在PET衬底上沉积的柔性复合薄膜的导电性和透光性均低于同结构的玻璃衬底样品的相应特性，Tave(400-800)为84.65%，Rs为8.58 Ω/□，ϕTC(400-800)为22.02×10−3 Ω−1。结论 亚纳米厚度Cu种子层的引入可有效增强金属导电层在TiO2介质层上沉积成膜的均匀性，在较高表面粗糙度的柔性衬底上沉积的复合薄膜相对于同结构的玻璃衬底薄膜显示出较低的透光和导电性能。 |
| 英文摘要: |
| The work aims to investigate the effect of substrate materials on the properties of composite films by depositing TiO2/Cu/Ag/TiO2 multilayered transparent conductive films on different substrates via magnetron sputtering and analyzing the microstructure and optical and electrical performance of the films. TiO2/Cu/Ag/TiO2 films with varied structural parameters were deposited layer by layer on soda-lime glass and flexible PET substrates, respectively, with TiO2, Cu and Ag targets of purity ≥99.99%, where RF and DC sputtering power sources were adopted correspondingly. Scanning electron microscope, atomic force microscope, ultraviolet-visible spectrophotometer and four-probe tester were used for the analysis of the microstructure, phase constitution, light transmittance and electrical conductivity of the films. The multilayer film deposited on the glass substrate with the optimized structure had uniform interface morphology, excellent light transmittance and electrical conductivity. The average transmittivity Tave(400-800) in visible light band was 91.73%, the sheet resistance Rs was 5.52 Ω/□, and the Figure of Merit ϕTC(400-800) was 76.47×10−3 Ω−1. Whereas the flexible composite films deposited on the PET substrate had lower optical and electrical performance than the counterpart film on glass substrate. The optimal result of the flexible films was 84.65% for Tave(400-800), 8.58 Ω/□ for Rs, and 22.02×10−3 Ω−1 for ϕTC(400-800). The introduction of sub-nanometered Cu seed layer can enhance the uniformity of metallic conductive layer effectively on TiO2 layer. The multilayer films deposited on the flexible substrate with higher surface roughness exhibit lower transmittance and electrical conductivity than those deposited on the glass substrate with the identical structures. |
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